Browsing Conference contributions by author "Cabannes-Boue, Benjamin"
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Top-coats for scalable Nano-manufacturing with High-chi Block Copolymers in Lithographic Applications
Chevalier, Xavier; Correia, Cindy Gomez; Pound-Lana, Gwenaelle; Bezard, Philippe; Serege, Matthieu; Petit-Etienne, Camille; Gay, Guillaume; Cunge, Gilles; Cabannes-Boue, Benjamin; Nicolet, Celia; Navarro, Christophe; Cayrefourcq, Ian; Mueller, Marcus; Hadziioannou, Georges; Iliopoulos, Ilias; Fleury, Guillaume; Zelsmann, Marc (2021)