Browsing Conference contributions by imec author "cd3e64a73c9d9dd42da54335dab7c506c09d0bf4"
Now showing items 1-2 of 2
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Managing and controlling contamination in an advanced 8" CMOS pilot line
De Backker, Kris; Deweerd, Wim; Lebon, Hans (2001) -
The need for EUV lithography at advanced technology for sustainable wafer cost
Mallik, Arindam; Vansumere, Wim; Ryckaert, Julien; Mercha, Abdelkarim; Horiguchi, Naoto; Demuynck, Steven; Boemmels, Juergen; Tokei, Zsolt; Vandenberghe, Geert; Ronse, Kurt; Thean, Aaron; Verkest, Diederik; Lebon, Hans; Steegen, An (2013)