Browsing Conference contributions by author "Abbasirad, Najmeh"

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Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

Abbasirad, Najmeh; Saadeh, Qais; Ciesielski, Richard; Gottwald, Alexander; Philipsen, Vicky; Makhotkin, Igor; Sokolov, Andrey; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2023)
Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

Ciesielski, Richard; Lohr, Leonhard M.; Mertens, Hans; Charley, Anne-Laure; de Ruyter, Rudi; Bogdanowicz, Janusz; Hoenicke, Philipp; Abbasirad, Najmeh; Soltwisch, Victor (2023)