Browsing Conference contributions by imec author "d4176091c4f66bc6b73b1d46817bdf3ca298fe5d"
Now showing items 1-3 of 3
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Development of main chain scission type photoresists for EUV lithography
Shirotori, Akihide; Vesters, Yannick; Hoshino, Manabu; Rathore, Ashish; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu (2019) -
Improved resolution with main chain scission resists for EUV lithography
Shirotori, Akihide; Hoshino, Manabu; Rathore, Ashish; Fu, Yeh Sin; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu (2022) -
To bake or not to bake... : the role of prebake in the EUV resist process
Pollentier, Ivan; Rathore, Ashish; Gupta, Mihir; De Simone, Danilo; Suh, Hyo Seon (2022-05-25)