EISBN
978-1-5106-4986-6
ISBN
978-1-5106-4985-9
ISSN
0277-786X
Conference
Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference
Journal
Advances in Patterning Materials and Processes XXXIX
Volume
12055
Research discipline
Electrical & electronic engineering
Title
To bake or not to bake... : the role of prebake in the EUV resist process
Publication type
Proceedings paper
Embargo date
2022-05-31