Publication:

To bake or not to bake... : the role of prebake in the EUV resist process

Date

2022-05-25
Proceedings Paper
https://doi.org/10.1117/12.2616094
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Accepted version 761.13 KB

Author(s)

Pollentier, Ivan  
;
Rathore, Ashish  
;
Gupta, Mihir  
;
De Simone, Danilo  
;
Suh, Hyo Seon  

Journal

Advances in Patterning Materials and Processes XXXIX

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