Publication:

To bake or not to bake... : the role of prebake in the EUV resist process

Date

2022-05-25
Proceedings Paper
https://doi.org/10.1117/12.2616094
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 761.13 KB

Author(s)

Pollentier, Ivan  
;
Rathore, Ashish  
;
Gupta, Mihir  
;
De Simone, Danilo  
;
Suh, Hyo Seon  

Journal

Advances in Patterning Materials and Processes XXXIX

Abstract

Description

Statistics

Downloads

776 since deposited on 2022-09-08
53last month
11last week
Acq. date: 2026-02-24

Views

1315 since deposited on 2022-09-08
Acq. date: 2026-02-24

Citations

Statistics

Downloads

776 since deposited on 2022-09-08
53last month
11last week
Acq. date: 2026-02-24

Views

1315 since deposited on 2022-09-08
Acq. date: 2026-02-24

Citations