dc.contributor.author | Chen, Rongmei | |
dc.contributor.author | Sisto, Giuliano | |
dc.contributor.author | Jourdain, Anne | |
dc.contributor.author | Hiblot, Gaspard | |
dc.contributor.author | Stucchi, Michele | |
dc.contributor.author | Kakarla, Naveen | |
dc.contributor.author | Chehab, Bilal | |
dc.contributor.author | Salahuddin, Shairfe Muhammad | |
dc.contributor.author | Schleicher, Filip | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Weckx, Pieter | |
dc.contributor.author | Milojevic, Dragomir | |
dc.contributor.author | Van der Plas, Geert | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2022-08-25T14:03:34Z | |
dc.date.available | 2022-07-09T02:27:43Z | |
dc.date.available | 2022-08-25T14:03:34Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000812325400034 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40084.2 | |
dc.source | WOS | |
dc.title | Design and Optimization of SRAM Macro and Logic Using Backside Interconnects at 2nm node | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Chen, Rongmei | |
dc.contributor.imecauthor | Sisto, Giuliano | |
dc.contributor.imecauthor | Jourdain, Anne | |
dc.contributor.imecauthor | Hiblot, Gaspard | |
dc.contributor.imecauthor | Stucchi, Michele | |
dc.contributor.imecauthor | Kakarla, Naveen | |
dc.contributor.imecauthor | Chehab, Bilal | |
dc.contributor.imecauthor | Salahuddin, Shairfe Muhammad | |
dc.contributor.imecauthor | Schleicher, Filip | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | Weckx, Pieter | |
dc.contributor.imecauthor | Milojevic, Dragomir | |
dc.contributor.imecauthor | Van der Plas, Geert | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Sisto, Giuliano::0000-0001-8706-4311 | |
dc.contributor.orcidimec | Hiblot, Gaspard::0000-0002-3869-965X | |
dc.contributor.orcidimec | Salahuddin, Shairfe Muhammad::0000-0002-6483-8430 | |
dc.contributor.orcidimec | Schleicher, Filip::0000-0003-3630-7285 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.identifier.doi | 10.1109/IEDM19574.2021.9720528 | |
dc.identifier.eisbn | 978-1-6654-2572-8 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 11-16, 2021 | |
dc.source.conferencelocation | San Francisco | |
dc.source.journal | na | |
imec.availability | Published - imec | |