Publication:

Inspection and metrology challenges for 3 nm node devices and beyond

Date

2021

Proceedings Paper

https://doi.org/10.1109/IEDM19574.2021.9720711

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Author(s)

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Horiguchi, Naoto

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Briggs, Basoene

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Bogdanowicz, Janusz

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De Bisschop, Peter

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Charley, Anne-Laure

Journal

na

Metrics

1629 since deposited on 2022-07-09

Acq. date: 2025-12-16