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Integration of PZT ferroelectric capacitors in submicron CMOS processes: results and future challenges

dc.contributor.authorWouters, Dirk
dc.contributor.authorNorga, Gerd
dc.contributor.authorBartic, Andrei
dc.contributor.authorFè, Laura
dc.contributor.authorHaspeslagh, Luc
dc.date.accessioned2021-10-14T11:58:21Z
dc.date.available2021-10-14T11:58:21Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4033
dc.sourceIIOimport
dc.titleIntegration of PZT ferroelectric capacitors in submicron CMOS processes: results and future challenges
dc.typeOral presentation
dc.contributor.imecauthorHaspeslagh, Luc
dc.source.peerreviewno
dc.source.conferenceCOST 514 Workshop on Ferroelectric Ceramic Thin Films
dc.source.conferencedate16/04/1999
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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