Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/40370.3
Patterning of Ru metal lines at 18 nm pitch
dc.contributor.author | Decoster, Stefan | |
dc.contributor.author | Kundu, Souvik | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Lariviere, Stephane | |
dc.contributor.author | O'Toole, Martin | |
dc.contributor.author | Murdoch, Gayle | |
dc.contributor.author | Quoc Toan Le | |
dc.contributor.author | van der Veen, Marleen | |
dc.contributor.author | Heylen, Nancy | |
dc.date.accessioned | 2022-09-08T02:38:39Z | |
dc.date.available | 2022-09-08T02:38:39Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4987-3 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844514700003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40370 | |
dc.source | WOS | |
dc.title | Patterning of Ru metal lines at 18 nm pitch | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Decoster, Stefan | |
dc.contributor.imecauthor | Kundu, Souvik | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Lariviere, Stephane | |
dc.contributor.imecauthor | O'Toole, Martin | |
dc.contributor.imecauthor | Murdoch, Gayle | |
dc.contributor.imecauthor | Quoc Toan Le | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.identifier.doi | 10.1117/12.2614267 | |
dc.identifier.eisbn | 978-1-5106-4988-0 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Advanced Etch Technology and Process Integration for Nanopatterning XI Part of SPIE Advanced Lithography and Patterning Conference | |
dc.source.conferencedate | APR 24-MAY 27, 2020-2022 | |
dc.source.volume | 12056 | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |