Publication:

Patterning of Ru metal lines at 18 nm pitch

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2614267
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Author(s)

Decoster, Stefan  
;
Kundu, Souvik  
;
Lazzarino, Frederic  
;
Lariviere, Stephane  
;
O'Toole, Martin  
;
Murdoch, Gayle  
;
van der Veen, Marleen  
;
Heylen, Nancy  
;
Le, Quoc Toan  

Journal

Proceedings of SPIE

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