Publication:

Patterning of Ru metal lines at 18 nm pitch

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2614267
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

PrimaryPublished version 768.42 KB

Author(s)

Decoster, Stefan  
;
Kundu, Souvik  
;
Lazzarino, Frederic  
;
Lariviere, Stephane  
;
O'Toole, Martin  
;
Murdoch, Gayle  
;
van der Veen, Marleen  
;
Heylen, Nancy  
;
Le, Quoc Toan  

Journal

Proceedings of SPIE

Abstract

Description

Statistics

Downloads

918 since deposited on 2022-09-08
57last month
11last week
Acq. date: 2026-10-13

Views

1390 since deposited on 2022-09-08
2last month
Acq. date: 2026-10-13

Citations

Statistics

Downloads

918 since deposited on 2022-09-08
57last month
11last week
Acq. date: 2026-10-13

Views

1390 since deposited on 2022-09-08
2last month
Acq. date: 2026-10-13

Citations