Publication:
Patterning of Ru metal lines at 18 nm pitch
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Acq. date: 2025-12-15
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434 since deposited on 2022-09-08
46last month
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Acq. date: 2025-12-15
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1377 since deposited on 2022-09-08
3last month
Acq. date: 2025-12-15
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