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Patterning of Ru metal lines at 18 nm pitch
Publication:
Patterning of Ru metal lines at 18 nm pitch
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Date
2022
Proceedings Paper
https://doi.org/10.1117/12.2614267
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Decoster, Stefan
;
Kundu, Souvik
;
Lazzarino, Frederic
;
Lariviere, Stephane
;
O'Toole, Martin
;
Murdoch, Gayle
;
van der Veen, Marleen
;
Heylen, Nancy
;
Le, Quoc Toan
Journal
Proceedings of SPIE
Abstract
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434
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1377
since deposited on 2022-09-08
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Acq. date: 2025-12-15
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Downloads
434
since deposited on 2022-09-08
46
last month
8
last week
Acq. date: 2025-12-15
Views
1377
since deposited on 2022-09-08
3
last month
Acq. date: 2025-12-15
Citations