Publication:

Patterning of Ru metal lines at 18 nm pitch

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2614267

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PrimaryPublished version 768.42 KB

Author(s)

Decoster, Stefan

;

;

Lazzarino, Frederic

;

Lariviere, Stephane

;

O'Toole, Martin

;

;

van der Veen, Marleen

;

;

Journal

Proceedings of SPIE

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