Publication:

Patterning of Ru metal lines at 18 nm pitch

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2614267
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dc.contributor.authorDecoster, Stefan
dc.contributor.authorKundu, Souvik
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorLariviere, Stephane
dc.contributor.authorO'Toole, Martin
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorHeylen, Nancy
dc.contributor.authorLe, Quoc Toan
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorKundu, Souvik
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorLariviere, Stephane
dc.contributor.imecauthorO'Toole, Martin
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecKundu, Souvik::0000-0001-5815-8765
dc.contributor.orcidimecLariviere, Stephane::0009-0004-9271-2191
dc.contributor.orcidimecMurdoch, Gayle::0000-0002-6833-220X
dc.contributor.orcidimecHeylen, Nancy::0009-0008-0490-0993
dc.date.accessioned2022-12-15T15:18:19Z
dc.date.available2022-09-08T02:38:39Z
dc.date.available2022-10-10T10:22:30Z
dc.date.available2022-12-15T15:18:19Z
dc.date.issued2022
dc.identifier.doi10.1117/12.2614267
dc.identifier.eisbn978-1-5106-4988-0
dc.identifier.isbn978-1-5106-4987-3
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40370
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1205604
dc.source.conferenceConference on Advanced Etch Technology and Process Integration for Nanopatterning XI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedateAPR 24-MAY 27, 2020-2022
dc.source.conferencelocationSan Jose, California, USA
dc.source.journalProceedings of SPIE
dc.source.numberofpages10
dc.source.volume12056
dc.title

Patterning of Ru metal lines at 18 nm pitch

dc.typeProceedings paper
dspace.entity.typePublication
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