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Subsurface Scanning Probe Metrology for Overlay through Opaque Layers

dc.contributor.authorBattisti, I
dc.contributor.authorMakles, K. M.
dc.contributor.authorMucientes, M. S. J.
dc.contributor.authorGuo, Y.
dc.contributor.authorSimons, E.
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorMoussa, Alain
dc.contributor.authorBlanco, Victor
dc.contributor.authorYasin, Farrukh
dc.contributor.authorCrotti, Davide
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorLeray, Philippe
dc.contributor.authorvan Reijzen, M. E.
dc.contributor.authorBozdog, C.
dc.contributor.authorSadeghian, H.
dc.date.accessioned2022-09-08T15:09:56Z
dc.date.available2022-09-08T02:39:00Z
dc.date.available2022-09-08T15:09:56Z
dc.date.issued2022
dc.identifier.isbn978-1-5106-4981-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000844549800034
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40381.2
dc.sourceWOS
dc.titleSubsurface Scanning Probe Metrology for Overlay through Opaque Layers
dc.typeProceedings paper
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorYasin, Farrukh
dc.contributor.imecauthorCrotti, Davide
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorLeray, Philippe
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecBlanco, Victor::0000-0003-4308-0381
dc.contributor.orcidimecYasin, Farrukh::0000-0002-7295-0254
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.identifier.doi10.1117/12.2616093
dc.identifier.eisbn978-1-5106-4982-8
dc.source.numberofpages10
dc.source.peerreviewyes
dc.source.beginpage1205310
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedateFEB 24-MAY 27, 2022
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12053
imec.availabilityPublished - imec


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220.500.12860/40381.2*2022-09-08T15:04:41Zvalidation by library/open access desk
120.500.12860/403812022-09-08T02:39:00Z

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