Publication:

E-beam metrology-based EUVL aberration monitoring

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2615955
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Kang, Seulki
;
Miura, Yuji
;
Maruyama, Kotaro
;
Yamazaki, Yuichiro
;
Wei, Chih-, I
;
Maguire, Ethan
;
Fenger, Germain
;
De Bisschop, Peter  
;
Das, Sayantan  
;
Halder, Sandip  
;
Lorusso, Gian  

Journal

Proceedings of SPIE

Abstract

Description

Metrics

Views

1281 since deposited on 2022-09-08
1last month
Acq. date: 2026-01-10

Citations

Metrics

Views

1281 since deposited on 2022-09-08
1last month
Acq. date: 2026-01-10

Citations