dc.contributor.author | Cong Que Dinh | |
dc.contributor.author | Nagahara, Seiji | |
dc.contributor.author | Yoshida, Keisuke | |
dc.contributor.author | Kondo, Yoshihiro | |
dc.contributor.author | Muramatsu, Makoto | |
dc.contributor.author | Yoshihara, Kosuke | |
dc.contributor.author | Shimada, Ryo | |
dc.contributor.author | Moriya, Teruhiko | |
dc.contributor.author | Nafus, Kathleen | |
dc.contributor.author | Petersen, John | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Foubert, Philippe | |
dc.contributor.author | Vandenberghe, Geert | |
dc.date.accessioned | 2023-01-19T12:55:32Z | |
dc.date.available | 2022-09-08T02:39:18Z | |
dc.date.available | 2023-01-19T12:55:32Z | |
dc.date.issued | 2021 | |
dc.identifier.isbn | 978-1-5106-4057-3 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000844537900013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40390.2 | |
dc.source | WOS | |
dc.title | EUV resist performance enhancement by UV flood exposure for high NA EUV lithography | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Petersen, John | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Foubert, Philippe | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.identifier.doi | 10.1117/12.2583922 | |
dc.identifier.eisbn | 978-1-5106-4058-0 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 116120L | |
dc.source.conference | Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference | |
dc.source.conferencedate | FEB 22-26, 2021 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 11612 | |
imec.availability | Published - imec | |