dc.contributor.author | Marinins, Aleksandrs | |
dc.contributor.author | Kjellman, Jon | |
dc.contributor.author | Caer, Charles | |
dc.contributor.author | Kongnyuy, Tangla David | |
dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Jansen, Roelof | |
dc.contributor.author | Soussan, Philippe | |
dc.date.accessioned | 2022-09-22T12:15:39Z | |
dc.date.available | 2022-09-09T02:41:55Z | |
dc.date.available | 2022-09-22T12:15:39Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2160-9020 | |
dc.identifier.other | WOS:000831479803276 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40402.2 | |
dc.source | WOS | |
dc.title | Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Marinins, Aleksandrs | |
dc.contributor.imecauthor | Kjellman, Jon | |
dc.contributor.imecauthor | Caer, Charles | |
dc.contributor.imecauthor | Kongnyuy, Tangla David | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Jansen, Roelof | |
dc.contributor.imecauthor | Soussan, Philippe | |
dc.contributor.orcidimec | Marinins, Aleksandrs::0000-0002-0728-6684 | |
dc.contributor.orcidimec | Kjellman, Jon::0000-0002-9073-4344 | |
dc.contributor.orcidimec | Caer, Charles::0000-0002-2735-2423 | |
dc.contributor.orcidimec | Kongnyuy, Tangla David::0000-0001-9063-7555 | |
dc.contributor.orcidimec | Rottenberg, Xavier::0000-0003-0920-1709 | |
dc.contributor.orcidimec | Jansen, Roelof::0000-0001-6685-4699 | |
dc.contributor.orcidimec | Soussan, Philippe::0000-0002-1347-6978 | |
dc.identifier.eisbn | 978-1-943580-91-0 | |
dc.source.numberofpages | 2 | |
dc.source.peerreview | yes | |
dc.source.beginpage | SF2A.3 | |
dc.source.conference | Conference on Lasers and Electro-Optics (CLEO) | |
dc.source.conferencedate | MAY 09-14, 2021 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | na | |
imec.availability | Published - imec | |