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Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

dc.contributor.authorMarinins, Aleksandrs
dc.contributor.authorKjellman, Jon
dc.contributor.authorCaer, Charles
dc.contributor.authorKongnyuy, Tangla David
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorSoussan, Philippe
dc.date.accessioned2022-09-22T12:15:39Z
dc.date.available2022-09-09T02:41:55Z
dc.date.available2022-09-22T12:15:39Z
dc.date.issued2021
dc.identifier.issn2160-9020
dc.identifier.otherWOS:000831479803276
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40402.2
dc.sourceWOS
dc.titleDual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers
dc.typeProceedings paper
dc.contributor.imecauthorMarinins, Aleksandrs
dc.contributor.imecauthorKjellman, Jon
dc.contributor.imecauthorCaer, Charles
dc.contributor.imecauthorKongnyuy, Tangla David
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecMarinins, Aleksandrs::0000-0002-0728-6684
dc.contributor.orcidimecKjellman, Jon::0000-0002-9073-4344
dc.contributor.orcidimecCaer, Charles::0000-0002-2735-2423
dc.contributor.orcidimecKongnyuy, Tangla David::0000-0001-9063-7555
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.identifier.eisbn978-1-943580-91-0
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.beginpageSF2A.3
dc.source.conferenceConference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedateMAY 09-14, 2021
dc.source.conferencelocationSan Jose
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/40402.2*2022-09-22T12:11:13Zvalidation by library/open access desk
120.500.12860/404022022-09-09T02:41:55Z

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