Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers
Metadata
Show full item record
Authors
Marinins, Aleksandrs
;
Kjellman, Jon
;
Caer, Charles
;
Kongnyuy, Tangla David
;
Rottenberg, Xavier
;
Jansen, Roelof
;
Soussan, Philippe
EISBN
978-1-943580-91-0
ISSN
2160-9020
Conference
Conference on Lasers and Electro-Optics (CLEO)
Journal
na
Title
Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers
Publication type
Proceedings paper
Collections
Conference contributions
Version history
Version
Item
Date
Summary
2
20.500.12860/40402.2
*
2022-09-22T12:11:13Z
validation by library/open access desk
1
20.500.12860/40402
2022-09-09T02:41:55Z
*Selected version
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login