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Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers
dc.contributor.author | Marinins, A. | |
dc.contributor.author | Kjellman, J. | |
dc.contributor.author | Caer, C. | |
dc.contributor.author | David, T. | |
dc.contributor.author | Rottenberg, X. | |
dc.contributor.author | Jansen, R. | |
dc.contributor.author | Soussan, P. | |
dc.date.accessioned | 2022-09-09T02:41:55Z | |
dc.date.available | 2022-09-09T02:41:55Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2160-9020 | |
dc.identifier.other | WOS:000831479803276 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40402 | |
dc.source | WOS | |
dc.title | Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Marinins, A. | |
dc.contributor.imecauthor | Kjellman, J. | |
dc.contributor.imecauthor | Caer, C. | |
dc.contributor.imecauthor | David, T. | |
dc.contributor.imecauthor | Rottenberg, X. | |
dc.contributor.imecauthor | Jansen, R. | |
dc.contributor.imecauthor | Soussan, P. | |
dc.identifier.eisbn | 978-1-943580-91-0 | |
dc.source.numberofpages | 2 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Lasers and Electro-Optics (CLEO) | |
dc.source.conferencedate | MAY 09-14, 2021 | |
imec.availability | Under review |
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