dc.contributor.author | Pak, Murat | |
dc.contributor.author | Zanders, Wesley | |
dc.contributor.author | Wong, Patrick | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Blanc, Romuald | |
dc.contributor.author | Souriau, Laurent | |
dc.contributor.author | Lee, Jeonghoon | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.date.accessioned | 2022-12-15T15:41:47Z | |
dc.date.available | 2022-09-19T02:51:14Z | |
dc.date.available | 2022-12-15T15:41:47Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4977-4 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000850450900017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40458.2 | |
dc.source | WOS | |
dc.title | Orthogonal Array Pillar Process Development for High Density 4F2 Memory Cells at 40nm Pitch and Beyond | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Pak, Murat | |
dc.contributor.imecauthor | Zanders, Wesley | |
dc.contributor.imecauthor | Wong, Patrick | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.imecauthor | Blanc, Romuald | |
dc.contributor.imecauthor | Souriau, Laurent | |
dc.contributor.imecauthor | Lee, Jeonghoon | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.orcidimec | Wong, Patrick::0000-0003-3605-9680 | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Souriau, Laurent::0000-0002-5138-5938 | |
dc.identifier.doi | 10.1117/12.2618761 | |
dc.identifier.eisbn | 978-1-5106-4978-1 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 120510J | |
dc.source.conference | Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference | |
dc.source.conferencedate | APR 24-MAY 27, 2022 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12051 | |
imec.availability | Published - imec | |