EISBN
978-1-5106-4978-1
ISBN
978-1-5106-4977-4
ISSN
0277-786X
Conference
Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference
Journal
Proceedings of SPIE
Volume
12051
Title
Orthogonal Array Pillar Process Development for High Density 4F2 Memory Cells at 40nm Pitch and Beyond
Publication type
Proceedings paper