Browsing by author "Souriau, Laurent"

15nm half-pitch patterning: EUV + SELF-aligned double patterning

Versluijs, Janko; Souriau, Laurent; Hellin, David; Orain, Isabelle; Kimura, Yoshie; Kunnen, Eddy; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Wiaux, Vincent; Xu, Kaidong (2012)

15nm HP patterning with EUV and SADP: key contributors for improvement of LWR, LER, and CDU

Xu, Kaidong; Souriau, Laurent; Hellin, David; Versluijs, Janko; Wong, Patrick; Vangoidsenhoven, Diziana; Vandenbroeck, Nadia; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Tan, Chi Lim; Vertommen, Johan; Coenegrachts, Bart; Orain, I.; Kimura, Y.; Wiaux, Vincent; Boullart, Werner (2013)

15nm HP patterning with EUV lithography and SADP

Souriau, Laurent; Hellin, David; Kunnen, Eddy; Versluijs, Janko; Dekkers, Harold; Albert, Johan; Orain, Isabelle; Yoshie, Kimura; Xu, Kaidong; Vertommen, Johan; Wiaux, Vincent; Boullart, Werner (2012)

A Co/Ni-based perpendicular magnetic tunnel junction (p-MTJ) stack with improved reference layer for BEOL compatibility

Tomczak, Yoann; Lin, Tsann; Swerts, Johan; Couet, Sebastien; Mertens, Sofie; Liu, Enlong; Kim, Woojin; Sankaran, Kiroubanand; Pourtois, Geoffrey; Tsvetanova, Diana; Souriau, Laurent; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud (2016)

A model of threading dislocation density in strain-relaxed Ge and GaAs epitaxial films on Si (100)

Wang, Gang; Loo, Roger; Simoen, Eddy; Souriau, Laurent; Caymax, Matty; Heyns, Marc; Blanpain, Bart (2009-03)

A wet etching technique to reveal threading dislocations in thin germanium layers

Souriau, Laurent; Terzieva, Valentina; Meuris, Marc; Caymax, Matty (2008)

Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus

Verdonck, Patrick; Wang, Cong; Le, Quoc Toan; Souriau, Laurent; Vanstreels, Kris; Krishtab, Mikhail; Baklanov, Mikhaïl (2014)

Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus

Verdonck, Patrick; Wang, Cong; Souriau, Laurent; Vanstreels, Kris; Baklanov, Mikhaïl (2013)

Advances and challenges in ultra low-k patterning

Xu, Kaidong; Souriau, Laurent; Lazzarino, Frederic; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Boullart, Werner (2012)

All-electrical control of scaled spin logic devices based on domain wall motion

Raymenants, Eline; Wan, Danny; Couet, Sebastien; Souriau, Laurent; Thiam, Arame; Tsvetanova, Diana; Canvel, Yann; Asselberghs, Inge; Heyns, Marc; Nikonov, D. E.; Young, I. A.; Pizzini, S.; Nguyen, Van Dai; Radu, Iuliana (2020)

All-Electrical Control of Scaled Spin Logic Devices Based on Domain Wall Motion

Raymenants, Eline; Wan, Danny; Couet, Sebastien; Souriau, Laurent; Thiam, Arame; Tsvetanova, Diana; Canvel, Yann; Garello, Kevin; Kar, Gouri Sankar; Heyns, Marc; Asselberghs, Inge; Nikonov, Dmitri E.; Young, Ian A.; Pizzini, Stefania; Radu, Iuliana; Nguyen, Van Dai (2021)

Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge Layers on Si substrates

Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Clemente, Francesca; Satta, Alessandra; Meuris, Marc (2008)

Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge layers on Si substrates

Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Meuris, Marc (2007)

BEOLC compatiblehigh tunnel magneto resistance perpendicula magnetic tunnel junctions using a sacrificial Mg layer as CoFeB free layer cap

Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Tomczak, Yoann; Sankaran, Kiroubanand; Pourtois, Geoffrey; Kim, Woojin; Meersschaut, Johan; Souriau, Laurent; Radisic, Dunja; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud (2015)

Capacitor-less, Long-Retention (> 400s) DRAM Cell Paving the Way towards Low-Power and High-Density Monolithic 3D DRAM

Belmonte, Attilio; Oh, Hyungrock; Rassoul, Nouredine; Donadio, Gabriele Luca; Mitard, Jerome; Dekkers, Harold; Delhougne, Romain; Subhechha, Subhali; Vaisman Chasin, Adrian; van Setten, Michiel; Kljucar, Luka; Mao, Ming; Puliyalil, Harinarayanan; Pak, Murat; Teugels, Lieve; Tsvetanova, Diana; Banerjee, Kaustuv; Souriau, Laurent; Tokei, Zsolt; Goux, Ludovic; Kar, Gouri Sankar (2020)

Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution

Souriau, Laurent; Atanasova, Tanya; Terzieva, Valentina; Moussa, Alain; Caymax, Matty; Loo, Roger; Meuris, Marc; Vandervorst, Wilfried (2008)

CMP process steps for the fabrication of spin-transfer torque magnetic random access memory

Tsvetanova, Diana; Heylen, Nancy; Teugels, Lieve; Crotti, Davide; Donadio, Gabriele Luca; Kar, Gouri Sankar; Struyf, Herbert; Souriau, Laurent; Mertens, Sofie; Swerts, Johan; Couet, Sebastien; Lin, Tsann; Paraschiv, Vasile; Kim, Woojin; Rao, Siddharth (2016)

Comprehensive study of the fabrication of SGOI substrates By the Ge condensation technique: oxidation kinetics and relaxation mechanism

Souriau, Laurent; Wang, Gang; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc; Vandervorst, Wilfried (2009)

Comprehensive study of the fabrication of SGOI substrates by the Ge condensation technique: oxidation kinetics and relaxation mechanism

Souriau, Laurent; Wang, Gang; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc; Vandervorst, Wilfried (2009)

Defect aspects of Ge-on-Si materials and devices

Claeys, Cor; Eneman, Geert; Wang, Gang; Souriau, Laurent; Loo, Roger; Simoen, Eddy (2009)