Publication:
Nanoindentation based method to determine the thermal expansion coefficients of low-k dielectrics
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3 since deposited on 2022-09-22
Acq. date: 2026-10-07
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1572 since deposited on 2022-09-22
Acq. date: 2026-10-07
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3 since deposited on 2022-09-22
Acq. date: 2026-10-07
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1572 since deposited on 2022-09-22
Acq. date: 2026-10-07
Citations