Publication:

Dual monopole exposure strategy to improve extreme ultraviolet imaging

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.3.030501
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Author(s)

Franke, Joern-Holger
;
Brunner, Timothy A.
;
Hendrickx, Eric  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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806 since deposited on 2022-10-29
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1375 since deposited on 2022-10-29
Acq. date: 2026-04-26

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