Show simple item record

Plasma etch challenges and processing optimization in spin logic device fabrication

dc.contributor.authorCanvel, Yann
dc.contributor.authorSouriau, Laurent
dc.contributor.authorWan, Danny
dc.contributor.authorTrovato, Anna
dc.contributor.authorThiam, Arame
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorCarpenter, Robert
dc.contributor.authorRaymenants, Eline
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorCouet, Sebastien
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorNguyen, Van Dai
dc.date.accessioned2024-04-09T08:02:33Z
dc.date.available2022-11-14T09:21:54Z
dc.date.available2024-04-09T08:02:33Z
dc.date.issued2022-11-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40734.2
dc.titlePlasma etch challenges and processing optimization in spin logic device fabrication
dc.typeOral presentation
dc.contributor.imecauthorCanvel, Yann
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorTrovato, Anna
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorCarpenter, Robert
dc.contributor.imecauthorRaymenants, Eline
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorCouet, Sebastien
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorNguyen, Van Dai
dc.contributor.orcidimecCanvel, Yann::0009-0006-7501-9787
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecTsvetanova, Diana::0000-0002-5632-5539
dc.contributor.orcidimecCarpenter, Robert::0000-0003-0101-5952
dc.contributor.orcidimecAsselberghs, Inge::0000-0001-8371-3222
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecCouet, Sebastien::0000-0001-6436-9593
dc.contributor.orcidimecNguyen, Van Dai::0000-0001-6924-4298
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceAVS 68th International Symposium and Exhibition
dc.source.conferencedate2022-11
dc.source.conferencelocationPittsburgh
imec.availabilityPublished - imec


Files in this item

Thumbnail
Name:
AVS68_Talk_STMG_YC.pptx
Size:
70.36Mb
Format:
Unknown
Description:
Accepted version
View/open

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/40734.2*2024-04-09T07:56:19Zvalidation by library/open access desk
120.500.12860/407342022-11-14T09:21:54Z

*Selected version