dc.contributor.author | Chang, Xinyue | |
dc.contributor.author | Oprins, Herman | |
dc.contributor.author | Lofrano, Melina | |
dc.contributor.author | Vermeersch, Bjorn | |
dc.contributor.author | Ciofi, Ivan | |
dc.contributor.author | Varela Pedreira, Olalla | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2024-01-02T11:11:14Z | |
dc.date.available | 2022-11-16T13:54:33Z | |
dc.date.available | 2024-01-02T11:11:14Z | |
dc.date.issued | 2022-09-30 | |
dc.identifier.isbn | 978-1-6654-8502-9 | |
dc.identifier.issn | 2694-2135 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40747.2 | |
dc.title | Thermal analysis of advanced back-end-of-line structures and the impact of design parameters | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Chang, Xinyue | |
dc.contributor.imecauthor | Oprins, Herman | |
dc.contributor.imecauthor | Lofrano, Melina | |
dc.contributor.imecauthor | Vermeersch, Bjorn | |
dc.contributor.imecauthor | Ciofi, Ivan | |
dc.contributor.imecauthor | Varela Pedreira, Olalla | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Chang, Xinyue::0000-0003-1875-6132 | |
dc.contributor.orcidimec | Oprins, Herman::0000-0003-0680-4969 | |
dc.contributor.orcidimec | Vermeersch, Bjorn::0000-0001-8640-672X | |
dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
dc.contributor.orcidimec | Varela Pedreira, Olalla::0000-0002-2987-1972 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.contributor.orcidimec | Lofrano, Melina::0000-0002-3930-6459 | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.date.embargo | 2022-06-03 | |
dc.identifier.doi | 10.1109/iTherm54085.2022.9899564 | |
dc.identifier.eisbn | 978-1-6654-8503-6 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Physics | |
dc.source.conference | 2022 21st IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (iTherm) | |
dc.source.conferencedate | 31 May 2022 - 03 June 2022 | |
dc.source.conferencelocation | San Diego, CA, USA | |
dc.source.journal | N/A | |
imec.availability | Published - open access | |