dc.contributor.author | Kovalevich, Tatiana | |
dc.contributor.author | Witek, Barbara | |
dc.contributor.author | Riggs, Daniel | |
dc.contributor.author | Bekaert, Joost | |
dc.contributor.author | Van Look, Lieve | |
dc.contributor.author | Maslow, Mark John | |
dc.date.accessioned | 2023-06-09T08:15:51Z | |
dc.date.available | 2022-12-11T03:11:07Z | |
dc.date.available | 2023-03-16T13:03:21Z | |
dc.date.available | 2023-06-09T08:15:51Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-6049-6 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000890070800007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40859.3 | |
dc.source | WOS | |
dc.title | Spatial frequency breakdown of CD variation | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Kovalevich, Tatiana | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.imecauthor | Van Look, Lieve | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.date.embargo | 2022-12-31 | |
dc.identifier.doi | 10.1117/12.2640808 | |
dc.identifier.eisbn | 978-1-5106-6050-2 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 124720H | |
dc.source.conference | 37th European Mask and Lithography Conference | |
dc.source.conferencedate | JUN 20-23, 2022 | |
dc.source.conferencelocation | Leuven | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12472 | |
imec.availability | Published - open access | |