Publication:

Spatial frequency breakdown of CD variation

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2640808

Simple item page Full metadata Statistics

Files

Published version 1.36 MB

Author(s)

Kovalevich, Tatiana

;

;

;

;

Van Look, Lieve

;

Maslow, Mark John

Journal

Proceedings of SPIE

Statistics

478 since deposited on 2022-12-11

26last month

8last week

Acq. date: 2026-10-07

1206 since deposited on 2022-12-11

Acq. date: 2026-10-07