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Non-destructive determination of pore size distribution of low-k porous SOG films

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorKondoh, Eiichi
dc.contributor.authorGidley, D.
dc.contributor.authorLin, E.
dc.contributor.authorWu, Wen
dc.contributor.authorArao, H.
dc.contributor.authorMogilnikov, K. P.
dc.contributor.authorShamiryan, Denis
dc.contributor.authorNakashima, A.
dc.date.accessioned2021-10-14T12:40:09Z
dc.date.available2021-10-14T12:40:09Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4088
dc.sourceIIOimport
dc.titleNon-destructive determination of pore size distribution of low-k porous SOG films
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference60th Japan Society of Applied Physics Autumn Meeting; September 2000; Japan.
dc.source.conferencelocation
imec.availabilityPublished - imec


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