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Low temperature oxidation and selective etching of chemical vapor deposition a-SiC:H films
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Authors
Baklanov, Mikhaïl
;
Van Hove, Marleen
;
Mannaert, Geert
;
Vanhaelemeersch, Serge
;
Bender, Hugo
;
Conard, Thierry
;
Maex, Karen
Issue
3
Journal
J. Vacuum Science and Technology B
Volume
18
Title
Low temperature oxidation and selective etching of chemical vapor deposition a-SiC:H films
Publication type
Journal article
Embargo date
9999-12-31
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