Breakdown and recovery of thin gate oxides

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Authors

Bearda, Twan; Mertens, Paul; Heyns, Marc; Wallinga, H.; Woerlee, P.

Issue

6B

Journal

Japanese Journal of Applied Physics. Part 2: Letters

Volume

39

Title

Breakdown and recovery of thin gate oxides

Publication type

Journal article

Embargo date

9999-12-31

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