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Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
dc.contributor.author | Ngo, Anh Tuan | |
dc.contributor.author | Dey, Bappaditya | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Wang, Changhai | |
dc.date.accessioned | 2023-03-18T03:37:51Z | |
dc.date.available | 2023-03-18T03:37:51Z | |
dc.date.issued | 2023-FEB | |
dc.identifier.issn | 0894-6507 | |
dc.identifier.other | WOS:000935143900001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41302 | |
dc.source | WOS | |
dc.title | Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review | |
dc.type | Journal article review | |
dc.contributor.imecauthor | Ngo, Anh Tuan | |
dc.contributor.imecauthor | Dey, Bappaditya | |
dc.contributor.orcidimec | Dey, Bappaditya::0000-0002-0886-137X | |
dc.identifier.doi | 10.1109/TSM.2022.3217326 | |
dc.source.numberofpages | 13 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1 | |
dc.source.endpage | 13 | |
dc.source.journal | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | |
dc.source.issue | 1 | |
dc.source.volume | 36 | |
imec.availability | Under review |