Publication:

Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review

Date

2023
Journal Article Review
https://doi.org/10.1109/TSM.2022.3217326
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Author(s)

Ngo, Anh Tuan  
;
Dey, Bappaditya  
;
Halder, Sandip  
;
De Gendt, Stefan  
;
Wang, Changhai

Journal

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

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555 since deposited on 2023-03-18
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926 since deposited on 2023-03-18
Acq. date: 2026-02-28

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