Publication:

Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review

Date

2023
Journal Article Review
https://doi.org/10.1109/TSM.2022.3217326
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dc.contributor.authorNgo, Anh Tuan
dc.contributor.authorDey, Bappaditya
dc.contributor.authorHalder, Sandip
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorWang, Changhai
dc.contributor.imecauthorNgo, Anh Tuan
dc.contributor.imecauthorDey, Bappaditya
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDey, Bappaditya::0000-0002-0886-137X
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2024-03-12T10:22:45Z
dc.date.available2023-03-18T03:37:51Z
dc.date.available2023-03-20T11:10:39Z
dc.date.available2024-03-12T10:22:45Z
dc.date.embargo2022-10-26
dc.date.issued2023
dc.identifier.doi10.1109/TSM.2022.3217326
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41302
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage1
dc.source.endpage13
dc.source.issue1
dc.source.journalIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
dc.source.numberofpages13
dc.source.volume36
dc.title

Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review

dc.typeJournal article review
dspace.entity.typePublication
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