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Articles
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
Publication:
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
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Date
2023
Journal Article Review
https://doi.org/10.1109/TSM.2022.3217326
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ngo, Anh Tuan
;
Dey, Bappaditya
;
Halder, Sandip
;
De Gendt, Stefan
;
Wang, Changhai
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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533
since deposited on 2023-03-18
12
last month
2
last week
Acq. date: 2025-12-15
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923
since deposited on 2023-03-18
4
last month
2
last week
Acq. date: 2025-12-15
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