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Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
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Authors
Ngo, Anh Tuan
;
Dey, Bappaditya
;
Halder, Sandip
;
De Gendt, Stefan
;
Wang, Changhai
DOI
10.1109/TSM.2022.3217326
ISSN
0894-6507
Issue
1
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume
36
Title
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
Publication type
Journal article review
Embargo date
2022-10-26
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3
20.500.12860/41302.3
*
2024-03-12T10:17:16Z
validation by library/open access desk
2
20.500.12860/41302.2
2023-03-20T11:08:59Z
validation by imec author
1
20.500.12860/41302
2023-03-18T03:37:51Z
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