Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/41334.2
Single Mask Solution to Pattern BLP and SNLP using 0.33NA EUV for Next Generation DRAM Manufacturing
dc.contributor.author | Sah, Kaushik | |
dc.contributor.author | Cross, Andrew | |
dc.contributor.author | Das, Sayantan | |
dc.contributor.author | Fallica, Roberto | |
dc.contributor.author | Lee, Jeonghoon | |
dc.contributor.author | Kim, Ryoung-Han | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Maguire, Ethan | |
dc.contributor.author | Armeanu, Ana-Maria | |
dc.contributor.author | Sears, Monica | |
dc.contributor.author | Lafferty, Neal | |
dc.contributor.author | Liubich, Vlad | |
dc.contributor.author | Wei, Chih-, I | |
dc.contributor.author | Fenger, Germain | |
dc.date.accessioned | 2023-03-22T03:41:01Z | |
dc.date.available | 2023-03-22T03:41:01Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000944102600031 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41334 | |
dc.source | WOS | |
dc.title | Single Mask Solution to Pattern BLP and SNLP using 0.33NA EUV for Next Generation DRAM Manufacturing | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Das, Sayantan | |
dc.contributor.imecauthor | Fallica, Roberto | |
dc.contributor.imecauthor | Lee, Jeonghoon | |
dc.contributor.imecauthor | Kim, Ryoung-Han | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.orcidimec | Das, Sayantan::0000-0002-3031-0726 | |
dc.contributor.orcidimec | Fallica, Roberto::0000-0003-4523-9624 | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.identifier.doi | 10.1117/12.2645953 | |
dc.identifier.eisbn | 978-1-5106-5640-6 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | International Conference on Extreme Ultraviolet Lithography | |
dc.source.conferencedate | SEP 26-29, 2022 | |
dc.source.conferencelocation | Monterey | |
dc.source.volume | 12292 | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |