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Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detection

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Acq. date: 2026-09-16

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402 since deposited on 2023-05-04
18last month
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Acq. date: 2026-09-16

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1351 since deposited on 2023-05-04
1last month
Acq. date: 2026-09-14

Citations