B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

Rengo, Gianluca; Porret, Clément; Hikavyy, Andriy; Rosseel, Erik; Ayyad, Mustafa; Morris, Richard; Khazaka, Rami; Loo, Roger; Vantomme, Andre

doi:10.1149/2162-8777/ac546e

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B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

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2022

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https://doi.org/10.1149/2162-8777/ac546e

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ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

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565 since deposited on 2023-05-04

Acq. date: 2026-06-26

1363 since deposited on 2023-05-04

Acq. date: 2026-06-26

B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

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