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Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
dc.contributor.author | Vega-Gonzalez, V. | |
dc.contributor.author | Radisic, D. | |
dc.contributor.author | Choudhury, S. | |
dc.contributor.author | Tierno, D. | |
dc.contributor.author | Thiam, A. | |
dc.contributor.author | Batuk, D. | |
dc.contributor.author | Martinez, G. T. | |
dc.contributor.author | Seidel, F. | |
dc.contributor.author | Decoster, S. | |
dc.contributor.author | Kundu, S. | |
dc.contributor.author | Tsvetanova, D. | |
dc.contributor.author | Peter, A. | |
dc.contributor.author | de Coster, H. | |
dc.contributor.author | Sepulveda-Marquez, A. | |
dc.contributor.author | Altamirano-Sanchez, E. | |
dc.contributor.author | Chan, B. T. | |
dc.contributor.author | Drissi, Y. | |
dc.contributor.author | Sherazi, Y. | |
dc.contributor.author | Uk-Lee, J. | |
dc.contributor.author | Ciofi, I. | |
dc.contributor.author | Murdoch, G. | |
dc.contributor.author | Nagesh, N. | |
dc.contributor.author | Hellings, G. | |
dc.contributor.author | Ryckaert, J. | |
dc.contributor.author | Biesemans, S. | |
dc.contributor.author | Litta, E. Dentoni | |
dc.contributor.author | Horiguchi, N. | |
dc.contributor.author | Park, S. | |
dc.contributor.author | Tokei, Zs. | |
dc.date.accessioned | 2023-05-25T20:20:00Z | |
dc.date.available | 2023-05-25T20:20:00Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700139 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41616 | |
dc.source | WOS | |
dc.title | Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vega-Gonzalez, V. | |
dc.contributor.imecauthor | Radisic, D. | |
dc.contributor.imecauthor | Choudhury, S. | |
dc.contributor.imecauthor | Tierno, D. | |
dc.contributor.imecauthor | Thiam, A. | |
dc.contributor.imecauthor | Batuk, D. | |
dc.contributor.imecauthor | Martinez, G. T. | |
dc.contributor.imecauthor | Seidel, F. | |
dc.contributor.imecauthor | Decoster, S. | |
dc.contributor.imecauthor | Kundu, S. | |
dc.contributor.imecauthor | Tsvetanova, D. | |
dc.contributor.imecauthor | Peter, A. | |
dc.contributor.imecauthor | de Coster, H. | |
dc.contributor.imecauthor | Sepulveda-Marquez, A. | |
dc.contributor.imecauthor | Altamirano-Sanchez, E. | |
dc.contributor.imecauthor | Chan, B. T. | |
dc.contributor.imecauthor | Drissi, Y. | |
dc.contributor.imecauthor | Sherazi, Y. | |
dc.contributor.imecauthor | Uk-Lee, J. | |
dc.contributor.imecauthor | Ciofi, I. | |
dc.contributor.imecauthor | Murdoch, G. | |
dc.contributor.imecauthor | Nagesh, N. | |
dc.contributor.imecauthor | Hellings, G. | |
dc.contributor.imecauthor | Ryckaert, J. | |
dc.contributor.imecauthor | Biesemans, S. | |
dc.contributor.imecauthor | Litta, E. Dentoni | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.contributor.imecauthor | Park, S. | |
dc.contributor.imecauthor | Tokei, Zs. | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019483 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
imec.availability | Under review |
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