dc.contributor.author | Mertens, Hans | |
dc.contributor.author | Ritzenthaler, Romain | |
dc.contributor.author | Oniki, Yusuke | |
dc.contributor.author | Puttarame Gowda, Pallavi | |
dc.contributor.author | Mannaert, Geert | |
dc.contributor.author | Sebaai, Farid | |
dc.contributor.author | Hikavyy, Andriy | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Dupuy, Emmanuel | |
dc.contributor.author | Peter, Antony | |
dc.contributor.author | Vandersmissen, Kevin | |
dc.contributor.author | Radisic, Dunja | |
dc.contributor.author | Briggs, Basoene | |
dc.contributor.author | Batuk, Dmitry | |
dc.contributor.author | Geypen, Jef | |
dc.contributor.author | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.author | Seidel, Felix | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Chan, BT | |
dc.contributor.author | Mitard, Jerome | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2023-06-01T13:14:14Z | |
dc.date.available | 2023-05-25T20:20:01Z | |
dc.date.available | 2023-06-01T13:14:14Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700153 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41619.2 | |
dc.source | WOS | |
dc.title | Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mertens, Hans | |
dc.contributor.imecauthor | Ritzenthaler, Romain | |
dc.contributor.imecauthor | Oniki, Yusuke | |
dc.contributor.imecauthor | Puttarame Gowda, Pallavi | |
dc.contributor.imecauthor | Mannaert, Geert | |
dc.contributor.imecauthor | Sebaai, Farid | |
dc.contributor.imecauthor | Hikavyy, Andriy | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Dupuy, Emmanuel | |
dc.contributor.imecauthor | Peter, Antony | |
dc.contributor.imecauthor | Vandersmissen, Kevin | |
dc.contributor.imecauthor | Radisic, Dunja | |
dc.contributor.imecauthor | Briggs, Basoene | |
dc.contributor.imecauthor | Batuk, Dmitry | |
dc.contributor.imecauthor | Geypen, Jef | |
dc.contributor.imecauthor | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.imecauthor | Seidel, Felix | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Chan, BT | |
dc.contributor.imecauthor | Mitard, Jerome | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
dc.contributor.orcidimec | Dupuy, Emmanuel::0000-0003-3341-1618 | |
dc.contributor.orcidimec | Peter, Antony::0000-0001-5941-0563 | |
dc.contributor.orcidimec | Batuk, Dmitry::0000-0002-6384-6690 | |
dc.contributor.orcidimec | Martinez Alanis, Gerardo Tadeo::0000-0001-5036-0491 | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019497 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
dc.source.journal | na | |
imec.availability | Published - imec | |