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Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures

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1399 since deposited on 2023-05-25
8last month
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Acq. date: 2026-10-10

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Views

1399 since deposited on 2023-05-25
8last month
3last week
Acq. date: 2026-10-10

Citations