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Publication:

Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures

Date

2022
Proceedings Paper
https://doi.org/10.1109/IEDM45625.2022.10019497
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Author(s)

Mertens, Hans  
;
Ritzenthaler, Romain  
;
Oniki, Yusuke  
;
Puttarame Gowda, Pallavi  
;
Mannaert, Geert  
;
Sebaai, Farid  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Dupuy, Emmanuel  
;
Peter, Antony  
;
Vandersmissen, Kevin  
;
Radisic, Dunja  
;
Briggs, Basoene  
;
Batuk, Dmitry  
;
Geypen, Jef  
;
Martinez Alanis, Gerardo Tadeo  
;
Seidel, Felix  
;
Richard, Olivier  
;
Chan, BT  
;
Mitard, Jerome  
;
Dentoni Litta, Eugenio  
;
Horiguchi, Naoto  

Journal

na

Abstract

Description

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1375 since deposited on 2023-05-25
Acq. date: 2026-06-25

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1375 since deposited on 2023-05-25
Acq. date: 2026-06-25

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