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Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures
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Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures
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Date
2022
Proceedings Paper
https://doi.org/10.1109/IEDM45625.2022.10019497
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mertens, Hans
;
Ritzenthaler, Romain
;
Oniki, Yusuke
;
Puttarame Gowda, Pallavi
;
Mannaert, Geert
;
Sebaai, Farid
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Dupuy, Emmanuel
;
Peter, Antony
;
Vandersmissen, Kevin
;
Radisic, Dunja
;
Briggs, Basoene
;
Batuk, Dmitry
;
Geypen, Jef
;
Martinez Alanis, Gerardo Tadeo
;
Seidel, Felix
;
Richard, Olivier
;
Chan, BT
;
Mitard, Jerome
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
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na
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1343
since deposited on 2023-05-25
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last month
1
last week
Acq. date: 2026-01-09
Citations
Metrics
Views
1343
since deposited on 2023-05-25
5
last month
1
last week
Acq. date: 2026-01-09
Citations