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Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures

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1351 since deposited on 2023-05-25
2last month
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Acq. date: 2026-02-25

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1351 since deposited on 2023-05-25
2last month
1last week
Acq. date: 2026-02-25

Citations