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Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures
dc.contributor.author | Mertens, H. | |
dc.contributor.author | Ritzenthaler, R. | |
dc.contributor.author | Oniki, Y. | |
dc.contributor.author | Gowda, P. Puttarame | |
dc.contributor.author | Mannaert, G. | |
dc.contributor.author | Sebaai, F. | |
dc.contributor.author | Hikavyy, A. | |
dc.contributor.author | Rosseel, E. | |
dc.contributor.author | Dupuy, E. | |
dc.contributor.author | Peter, A. | |
dc.contributor.author | Vandersmissen, K. | |
dc.contributor.author | Radisic, D. | |
dc.contributor.author | Briggs, B. | |
dc.contributor.author | Batuk, D. | |
dc.contributor.author | Geypen, J. | |
dc.contributor.author | Martinez-Alanis, G. | |
dc.contributor.author | Seidel, F. | |
dc.contributor.author | Richard, O. | |
dc.contributor.author | Chan, B. T. | |
dc.contributor.author | Mitard, J. | |
dc.contributor.author | Litta, E. Dentoni | |
dc.contributor.author | Horiguchi, N. | |
dc.date.accessioned | 2023-05-25T20:20:01Z | |
dc.date.available | 2023-05-25T20:20:01Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700153 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41619 | |
dc.source | WOS | |
dc.title | Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mertens, H. | |
dc.contributor.imecauthor | Ritzenthaler, R. | |
dc.contributor.imecauthor | Oniki, Y. | |
dc.contributor.imecauthor | Gowda, P. Puttarame | |
dc.contributor.imecauthor | Mannaert, G. | |
dc.contributor.imecauthor | Sebaai, F. | |
dc.contributor.imecauthor | Hikavyy, A. | |
dc.contributor.imecauthor | Rosseel, E. | |
dc.contributor.imecauthor | Dupuy, E. | |
dc.contributor.imecauthor | Peter, A. | |
dc.contributor.imecauthor | Vandersmissen, K. | |
dc.contributor.imecauthor | Radisic, D. | |
dc.contributor.imecauthor | Briggs, B. | |
dc.contributor.imecauthor | Batuk, D. | |
dc.contributor.imecauthor | Geypen, J. | |
dc.contributor.imecauthor | Martinez-Alanis, G. | |
dc.contributor.imecauthor | Seidel, F. | |
dc.contributor.imecauthor | Richard, O. | |
dc.contributor.imecauthor | Chan, B. T. | |
dc.contributor.imecauthor | Mitard, J. | |
dc.contributor.imecauthor | Litta, E. Dentoni | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019497 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
imec.availability | Under review |
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