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Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments
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Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments
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Date
2022
Proceedings Paper
https://doi.org/10.1109/IEDM45625.2022.10019385
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franco, Jacopo
;
Arimura, Hiroaki
;
de Marneffe, Jean-Francois
;
Claes, Dieter
;
Brus, Stephan
;
Vandooren, Anne
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
;
Croes, Kristof
;
Kaczer, Ben
Journal
na
Abstract
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1245
since deposited on 2023-05-25
Acq. date: 2026-01-07
Citations
Metrics
Views
1245
since deposited on 2023-05-25
Acq. date: 2026-01-07
Citations