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Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments
dc.contributor.author | Franco, J. | |
dc.contributor.author | Arimura, H. | |
dc.contributor.author | de Marneffe, J. -F. | |
dc.contributor.author | Claes, D. | |
dc.contributor.author | Brus, S. | |
dc.contributor.author | Vandooren, A. | |
dc.contributor.author | Litta, E. Dentoni | |
dc.contributor.author | Horiguchi, N. | |
dc.contributor.author | Croes, K. | |
dc.contributor.author | Kaczer, B. | |
dc.date.accessioned | 2023-05-25T20:20:01Z | |
dc.date.available | 2023-05-25T20:20:01Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700043 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41620 | |
dc.source | WOS | |
dc.title | Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Franco, J. | |
dc.contributor.imecauthor | Arimura, H. | |
dc.contributor.imecauthor | de Marneffe, J. -F. | |
dc.contributor.imecauthor | Claes, D. | |
dc.contributor.imecauthor | Brus, S. | |
dc.contributor.imecauthor | Vandooren, A. | |
dc.contributor.imecauthor | Litta, E. Dentoni | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.contributor.imecauthor | Croes, K. | |
dc.contributor.imecauthor | Kaczer, B. | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019385 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
imec.availability | Under review |
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