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Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments
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Authors
Franco, Jacopo
;
Arimura, Hiroaki
;
de Marneffe, Jean-Francois
;
Claes, Dieter
;
Brus, Stephan
;
Vandooren, Anne
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
;
Croes, Kristof
;
Kaczer, Ben
DOI
10.1109/IEDM45625.2022.10019385
EISBN
978-1-6654-8959-1
ISSN
2380-9248
Conference
International Electron Devices Meeting (IEDM)
Journal
na
Title
Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments
Publication type
Proceedings paper
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2
20.500.12860/41620.2
*
2023-06-01T14:45:36Z
validation by library/open access desk
1
20.500.12860/41620
2023-05-25T20:20:01Z
*Selected version
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