dc.contributor.author | Franco, Jacopo | |
dc.contributor.author | Arimura, Hiroaki | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Claes, Dieter | |
dc.contributor.author | Brus, Stephan | |
dc.contributor.author | Vandooren, Anne | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Kaczer, Ben | |
dc.date.accessioned | 2023-06-01T14:48:38Z | |
dc.date.available | 2023-05-25T20:20:01Z | |
dc.date.available | 2023-06-01T14:48:38Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700043 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41620.2 | |
dc.source | WOS | |
dc.title | Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Franco, Jacopo | |
dc.contributor.imecauthor | Arimura, Hiroaki | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Claes, Dieter | |
dc.contributor.imecauthor | Brus, Stephan | |
dc.contributor.imecauthor | Vandooren, Anne | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
dc.contributor.orcidimec | de Marneffe, Jean-Francois::0000-0001-5178-6670 | |
dc.contributor.orcidimec | Brus, Stephan::0000-0003-3554-0640 | |
dc.contributor.orcidimec | Vandooren, Anne::0000-0002-2412-0176 | |
dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Arimura, Hiroaki::0000-0002-3138-708X | |
dc.contributor.orcidimec | Claes, Dieter::0000-0002-0356-0973 | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019385 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
dc.source.journal | na | |
imec.availability | Published - imec | |
dc.description.wosFundingText | Research funded by imec's Core Partner Program. | |