Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/41626.3
High performance La-doped HZO based ferroelectric capacitors by interfacial engineering
dc.contributor.author | Popovici, M. I. | |
dc.contributor.author | Bizindavyi, J. | |
dc.contributor.author | Favia, P. | |
dc.contributor.author | Clima, S. | |
dc.contributor.author | Alam, Md. Nur K. | |
dc.contributor.author | Ramachandran, R. K. | |
dc.contributor.author | Walke, A. M. | |
dc.contributor.author | Celano, U. | |
dc.contributor.author | Leonhardt, A. | |
dc.contributor.author | Mukherjee, S. | |
dc.contributor.author | Richard, O. | |
dc.contributor.author | Illiberi, A. | |
dc.contributor.author | Givens, M. | |
dc.contributor.author | Delhougne, R. | |
dc.contributor.author | Van Houdt, J. | |
dc.contributor.author | Kar, G. Sankar | |
dc.date.accessioned | 2023-05-25T20:20:22Z | |
dc.date.available | 2023-05-25T20:20:22Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700181 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41626 | |
dc.source | WOS | |
dc.title | High performance La-doped HZO based ferroelectric capacitors by interfacial engineering | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Popovici, M. I. | |
dc.contributor.imecauthor | Bizindavyi, J. | |
dc.contributor.imecauthor | Favia, P. | |
dc.contributor.imecauthor | Clima, S. | |
dc.contributor.imecauthor | Alam, Md. Nur K. | |
dc.contributor.imecauthor | Walke, A. M. | |
dc.contributor.imecauthor | Celano, U. | |
dc.contributor.imecauthor | Mukherjee, S. | |
dc.contributor.imecauthor | Richard, O. | |
dc.contributor.imecauthor | Delhougne, R. | |
dc.contributor.imecauthor | Van Houdt, J. | |
dc.contributor.imecauthor | Kar, G. Sankar | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019525 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |